Integrated circuit components incorporating energy harvesting components/devices, and methods for fabrication, manufacture and production of integrated circuit components incorporating energy harvesting components/devices

ABSTRACT

An integrated circuit system, structure and/or component is provided that includes an integrated electrical power source in a form of a unique, environmentally-friendly energy harvesting element or component. The energy harvesting component provides a mechanism for generating autonomous renewable energy, or a renewable energy supplement, in the integrated circuit system, structure and/or component. The energy harvesting element includes a first conductor layer, a low work function layer, a dielectric layer, and a second conductor layer that are particularly configured to promote electron migration from the low work function layer, through the dielectric layer, to the facing surface of the second conductor layer in a manner that develops an electric potential between the first conductor layer and the second conductor layer. An energy harvesting component includes a plurality of energy harvesting elements electrically connected to one another to increase a power output of the electric harvesting component.

This application is a Continuation of U.S. patent application Ser. No.15/693,457, filed Aug. 31, 2017, and issued as U.S. Pat. No. 10,096,648on Oct. 9, 2018; which in turn is a Divisional of U.S. patentapplication Ser. No. 15/095,065 filed Apr. 9, 2016, and issued as U.S.Pat. No. 9,786,718 on Oct. 10, 2017; the disclosures of which are herebyincorporated by reference herein in their entirety. This application isalso related to U.S. patent application Ser. No. 15/095,066, filed Apr.9, 2016, and issued as U.S. Pat. No. 9,793,317 on Oct. 17, 2017; and itis also related to U.S. patent application Ser. No. 15/095,063, filedApr. 9, 2016, and issued as U.S. Pat. No. 10,056,538 on Aug. 21, 2018;the disclosures of which are hereby incorporated by reference herein intheir entirety.

BACKGROUND 1. Field of the Disclosed Embodiments

This disclosure relates to structures for integrated circuits withintegral energy harvesting components and implementations of schemes forfabrication, manufacture and/or production of a unique,environmentally-friendly energy harvesting capacity, device and/orcomponent for providing autonomous renewable energy, or a renewableenergy supplement, in the integrated circuit (IC) components.

2. Related Art

Technologic advance over the last several decades, particularly sincethe advent of solid-state circuits and circuit components, has seen averitable explosion in the numbers and types of electronic systems,electronic devices, and electronic system components that are routinelyemployed by individuals, companies and other corporate entities, andgovernmental entities and/or agencies for communication, informationexchange, manufacturing improvement, tracking/surveillance, healthmonitoring, personal entertainment and the like. Machine-controlledprocesses improve information flow, manufacturing precision, informationexchange, and individual convenience in virtually every area of dailylife.

Structures of all types are environmentally monitored and controlled byelectronic sensor, anomaly detection, security and climate controlcomponents. Vehicles of all types include electronic navigationcommunication, and health monitoring systems. Electronic data exchangeand communication have become an all-too-necessary staple of commercialefficiency and individual convenience. Cellular telephones, oftensupported by powered wireless microphones, have become fairly ubiquitousin today's communicating environment.

Portable computing devices of all forms including tablet-type computersand other forms of hand-held personal digital assistant (PDA) deviceskeep individuals' documents, personal and professional calendars, listsand contact information, reference and presentation materials, photoalbums, music and other entertainment sources, and the like. Thesedevices facilitate numerical calculations, timekeeping and all forms ofdata storage keeping close at hand necessary and/or desired informationfor a particular user in the conduct of his or her employment functionsand personal tasks and/or enjoyment.

At a comparable rate, miniaturized, transistorized, solid-state, andother powered devices and/or system components are finding their wayincreasingly into many and widely-varied technology areas. Roboticdevices are increasingly replacing manual laborers in performing certainroutine repetitive tasks, and even in implementing intricatecomputer-aided design and manufacturing of components and componentstructures that cross a broad spectrum of manufacturing and piece/partproduction functions. The precision available in the use ofelectronically machine-implemented instructions far surpasses thatavailable by the efforts of even the most skilled artisan.

Many technologies have been enabled and/or aided by the implementationof transistorized, miniaturized and other solid-state devices and devicecomponents. A broad spectrum of medical devices, for example, fromdigital thermometers to glucometers to hearing aids to pacemakers to allmanner of personal health monitoring components, relying on miniaturizedsensors and solid-state circuitry for monitoring, augmentation andcommunication of information regarding often-critical health parametersof individuals.

Governmental, law enforcement and personal security and surveillanceefforts and capabilities are implemented using fixed and mobile sensors.Many individuals and entities are making increasing use of arrays offixed sensor components that are easily deployed and routinelymonitored, as well sensors field-deployed on a wide array of unmannedvehicles, including small unmanned aerial systems, carrying increasinglysophisticated monitoring and surveillance suites.

Particularized commercial embodiments of devices and systems that werenot even conceived of a decade ago are finding their way into thecommercial marketplace, many for making individuals' lives moreconvenient in the increasingly fast-paced world of data communicationand information exchange. These include, for example, deployable and/ormonitorable security tokens by which individuals can track everythingfrom their keys, to their luggage, to their kids, to their vehicles.Thirty years ago, who among us may have considered of the existence ofan electronic cigarette?

Electronic, and electronically-based, systems aid in productionefficiency and in precision. Consider the increasing number of retailestablishments using, almost exclusively, electronic payment systems, orat least electronic components for counting one's change.

To say that everything is becoming increasinglyelectronically-controlled is an understatement. Common to all of theseelectronic systems, electronic devices, and/or electronic systemcomponents, is the need for the electronic systems, electronic devices,and/or electronic system components to be powered. Power requirementstake all forms. These include requirements to provide certain constantpower supplies, for example, to volatile digital data storagecomponents, security sensor components, health monitoring devices,timing units and the like. They also include separate and/or relatedrequirements to be able to provide renewable or rechargeable on-demandpower to any one of the above-mentioned communication, informationexchange, or sensor devices in a manner that allows those devices to begenerally autonomously operated apart from being tied to some bulky, orlimited mobility, power source or power supply.

The global power requirement to support the above non-exhaustive list ofuse cases, which may also include one's electric watch for preciselytelling time, one's electronic rangefinder for precisely measuring thatnext shot on the golf course, one's electronic firearm sights forprecisely firing the weapon, and one's remote control devices of everyform, shape and function, for conveniently changing the channels on theTV, opening the garage door, and/or starting the car, to name but a few,is, in the aggregate, immense.

Supporting a global power requirement necessitates the expending ofnatural, naturally occurring, and/or manufactured/refined resources. Thestorehouse of available resources may have a limit at which thoseresources may be depleted. Concerns further arise not only regarding theultimate availability of the resources, but also with respect to theadverse effects that may arise with respect to the conversion of certainof those resources to a usable energy production output.

Advancing research efforts and resultant technologies with regard tomany of the above non-exhaustive list of use cases have, in manyinstances, systematically reduced the individual power requirements forproviding intermittent, or even constant, power to myriad electronicdevices, and electronic components housed within larger componentssystems. Renewable energy technologies are pursued that seek to furtherreduce the global impact of overall energy production by attempting tomeet increasingly-efficient power requirements or constraints, withincreasingly environmentally-friendly energy sources.

SUMMARY

As the individual electronic component or unit power requirements arereduced, it may be advantageous to find implementing electrical powergeneration and delivery strategies, and to design and fabricateelectrical power generation components that could be usable in portableelectronic devices, and the electronic components housed within suchdevices, for example, to supplant, or at least augment, chemicalbattery, or other source, power generation and delivery to those devicesor components in an environmentally friendly, and renewable, powersource.

Exemplary embodiments of the systems and methods according to thisdisclosure may provide energy harvesting devices and components (“energyharvesters,” EH elements, or EH components) that are uniquely configuredto provide measurable electrical output for supplying power toelectronic systems, electronic devices and/or electrically-poweredsystem components.

Exemplary embodiments may provide a method for forming a unique EHelement or EH component structure that harnesses usable power at anatomic level and packages the usable electronic potential in a form thatmay be usable to autonomously power an integrated circuit (IC) componentaccording to a generally renewable physical reactions for thermalconversion at the atomic level in the EH element or EH componentstructure.

Exemplary embodiments may form structures that convert available thermalenergy at any temperature above absolute zero to a usable electricalpotential in embodiments in which an ability to maintain a staticelectric potential between electrodes may be useful.

Exemplary embodiments of the fabricated structures may convert thermalenergy at any temperature above absolute zero to a usable electricaloutput from an EH element or EH component in order to continuously, orintermittently, power an electronic system, electronic device and/orelectrically-powered system component.

Exemplary embodiments may provide a usable electrical power output atany temperature above absolute zero, and without exposure to anyseparate energy generating source. In embodiments, the disclosed EHelements and/or EH components may be usable to internally generateusable electrical power in environments that are devoid of any ambientlight.

Exemplary embodiments may advantageously employ physical properties ofparticularly manufactured and conditioned conductors, at an atomiclevel, to beneficially employ characteristic electron motion, andchanneling of that electron motion between conductors in a usable mannerby optimally conditioning surfaces of opposing conductors to havemeasurably different work functions.

In embodiments, electrons are predictably and advantageously caused tomigrate from a comparatively low work function surface of a firstconductor in a direction of, and to accumulate on, a comparatively highwork function surface of a second conductor thereby establishing anelectric potential between the first and second conductors.

In embodiments, quantum tunneling effects are optimized to promote theelectron migration from the low work function conductor surface andaccumulation of the electrons on the comparatively high work functionopposing (or facing) electrode surface.

Exemplary embodiments may optimize particular dielectric materialstructures interposed between the comparatively low work functionconductor surface and the comparatively high work function facingconductor surface to promote optimized or enhanced rates of electronmigration to, and accumulation on, the comparatively high work functionsurface of a facing electrode.

Exemplary embodiments may produce individualconductor-dielectric-conductor “sandwiched” energy harvesting elements.

Exemplary embodiments may aggregate pluralities of EH elements asparticularly-formed EH components for delivery of conditioned electricalpower as an autonomous power source or as a supplement to another powersource supplying power to electrical and/or electronic components.

Exemplary embodiments may provide particularly-formed EH components forelectrically powering ICs. In embodiments, the EH components may beformed as a part, or portion, of the IC component.

These and other features, and advantages, of the disclosed systems andmethods are described in, or apparent from, the following detaileddescription of various exemplary embodiments.

BRIEF DESCRIPTION OF THE DRAWINGS

Various exemplary embodiments of the disclosed systems and methodsrelating to implementations of a scheme for fabricating, producing orotherwise forming a unique, environmentally-friendly energy harvestingcapacity, device and/or EH element/component for providing autonomousrenewable energy, or a renewable energy supplement, in IC systemcomponents, will be described, in detail, with reference to thefollowing drawings, in which:

FIG. 1 illustrates a schematic diagram of a first exemplary embodimentof an EH element according to this disclosure;

FIG. 2 illustrates a schematic diagram of a second exemplary embodimentof an EH element according to this disclosure;

FIG. 3 illustrates a schematic diagram of a third exemplary embodimentof an EH element according to this disclosure;

FIG. 4 illustrates a schematic diagram of a fourth exemplary embodimentof an EH element according to this disclosure;

FIG. 5 illustrates a schematic diagram of an exemplary embodiment of asimple circuit powered by an EH element according to this disclosure;

FIG. 6 illustrates a schematic diagram of an exemplary embodiment of asimple circuit powered by an EH component, including a plurality of EHelements electrically connected to each other, according to thisdisclosure;

FIG. 7 illustrates a schematic diagram of an exemplary embodiment of anintegrated circuit (IC) component powered by an EH component, includinga plurality of EH elements electrically connected to each other,according to this disclosure;

FIGS. 8A-8I illustrate schematic diagrams of a series of exemplary stepsin a build process of an EH component, including a plurality of EHelements electrically connected to each other, according to thisdisclosure;

FIG. 9 illustrates a flowchart of an exemplary method for executing abuild process for an EH component, including a plurality of EH elementselectrically connected to each other, according to this disclosure; and

FIG. 10 illustrates a schematic diagram of an exemplary deviceincorporating at least at least one EH component according to thisdisclosure as an autonomous power source, or as a supplement to abattery, a photocell or another power source for powering the device.

DETAILED DESCRIPTION OF EMBODIMENTS

The systems and methods according to this disclosure relate tostructures for self-powered IC circuits and implementations of schemesfor fabricating, forming or otherwise producing a unique,environmentally-friendly energy harvesting capacity, device and/or EHcomponent for providing autonomous renewable energy, or a renewableenergy supplement, in IC circuit components. The disclosed EH componentmay be particularly formed according to a micro fabrication process onthe sub-micron scale to advantageously employ vibrational electronmotion in a particularly advantageous manner to render a measurableelectrical potential in, or to provide a measurable electrical outputfrom, an EH component composed of multiple “sandwiched” EH elementsaccording to a particular combination of physical structures thatcombine certain physical effects to provide the output electrical powerat virtually all temperatures above absolute zero, and in ambient lightdevoid environments.

The disclosed schemes advantageously configure physical structures tochannel electron motion, at the atomic level, in a manner that providesa measurable and useful electrical output. As power requirements forcertain electronic devices continue to decrease, the disclosedstructures of EH components may be advantageously employed toautonomously meet those power requirements, or to provide electricalenergy generation capacity by which to supplement other available powersources typically known to be provided for powering mobile and/or remotedevices where routine recharge, or battery replacement, currentlypresents a non-optimized operational configuration. The disclosed powergeneration structures and capabilities, and the scalability of theresources and outputs, have been, in a first instance, experimentallyreproduced in a laboratory environment.

Reference will be made to the employment of the disclosed exemplaryenergy harvesters, EH elements, or EH components to a number of realworld beneficial purposes. The discussion of any particular use case forapplication of the disclosed schemes should not be considered aslimiting the disclosed subject matter to employment with any particularclass of electrical component, electrical circuit, electronic device, orany particular electrically-driven system component. It should berecognized that any advantageous use of the disclosed schemes foremploying a particularly-configured EH component according to thedescribed embodiments to effect autonomous energy supply, orenergy-supply supplementation, employing systems, methods, techniques,processes and/or schemes such as those discussed in detail in thisdisclosure is contemplated as being included within the scope of thedisclosed exemplary systems and methods. In this regard, the disclosedsystems and methods will be described as being particularly adaptable toproviding measurable electrical power to certain electronic systems,electronic/electrical devices, and/or electrically-powered systemcomponents as easily-understandable and non-limiting examples ofparticularly advantageous uses of the disclosed EH elements and/or EHcomponents. General reference throughout this disclosure will be made toparticular use cases in which EH elements and/or EH components may beusable in the manner described above. Reference to any particular one ofthese use cases is not intended to exclude other use cases in which thedisclosed EH elements and/or EH components may be otherwise employed.

Reference to any particularly useful compositions of the materials fromwhich the disclosed component layers of the EH elements and/or EHcomponents may be formed and combined in the sub-micron scale are alsodescriptive only of broad classes of input materials that may be used.Suitable materials for such several Ångström-thick to tens of nanometersthick layers may be discussed specifically according to theircomposition, or may be more broadly referred to by certain functionalparameters, neither of which should be considered to limit the scope ofavailable input materials of which conductor layers, low work functionlayers and/or dielectric layers may be formed.

FIG. 1 illustrates a schematic diagram of a first exemplary embodimentof an EH element 100 according to this disclosure. In a simplest form,the disclosed schemes are directed to particular configurations ofcomponents for generating an electrical potential in the presence ofminimal ambient heat. As shown in FIG. 1, a particular arrangement ofthe disclosed EH element 100 may be in a form of a multi-layeredcomponent structure including at least a pair of opposing conductorlayers (conductors) 110, 140 set at a small interval (less than 100 nm,and in embodiments less than 100 angstroms) with respect to one another.The small interval between the conductors 110, 140 may be optimized toadvantageously make use of a known quantum tunneling effect, as will bedescribed in greater detail below.

Conductor 110 represents one of the output terminals for the harvestedenergy from the EH element 100. A surface of conductor 110 facingconductor 140 may be conditioned in a manner described below to lower awork function of the facing surface of the conductor 110. Inembodiments, this conditioning may be in the form of surface treatingthe conductor 110 with a particular low work function material, or in aform of depositing a separate particular low work function layer 120 onthe facing surface of the conductor 110. This low work function layer120 may be in intimate contact with the facing surface of the conductor110 and may be relatively thin, on an order of Ångströms, in thickness.The low work function layer 120 may have additional surfacemodifications made to it that further reduce a work function of the lowwork function layer 120.

A dielectric “layer” 130 may exist between the low work function layer120 on the facing surface of the conductor 110, and the facing surfaceof the conductor 140. Those of skill in the art recognize that adielectric layer may be in the form of a vacuum or an air gap, which isaccording to the depiction of the dielectric “layer” 130 in FIG. 1, andmay also be in the form of a solid or liquid dielectric material, asshown in other exemplary embodiments discussed below. As noted above,the dielectric “layer” 130 is very thin. Thus, a dielectric “layer” 130,as depicted in FIG. 1, while possible, may be comparatively moredifficult to engineer in that the dielectric “layer” 130 must maintainseparation between the low work function layer 120 and the facingsurface of the conductor 140. As will be described in greater detailbelow with reference to the exemplary embodiment in FIG. 2, thedielectric layer may comprise a physical structure which, for example,may have piezoelectric particles incorporated on its surfaces, orthroughout its structure.

Conductor 140 is the other of the output terminals for the harvestedenergy and has a facing surface with a relatively higher work functionand a low resistance to reduce losses. According to the mechanics of thedisclosed schemes, the structure shown in FIG. 1, and in like manner thestructures in FIGS. 2-4, may produce a static electric field that may,be usable even without discharging elements, or attachment to a load, toproduce, for example, a usable static electric field for employment inknown use cases including for biasing a transistor.

It is known that electrons have a certain amount of energy that isgenerally described according to Schrödinger's wave equation. It isunclear where the electron is precisely located, but it is contained incertain space around the atom. Work function is the energy required,usually specified in electron volts (eV), for the electrons to leave asurface of a material (often a metal surface) and to migrate, forexample, into a vacuum facing the surface of the material. Insolid-state physics, the work function is the minimum thermodynamic work(i.e., energy) needed to remove an electron from a surface of a solid toa final electron position separated from the surface of the solid on theatomic scale, but still too close enough to the surface of the solid tobe influenced by ambient electric fields. The work function is not acharacteristic of the bulk material, but rather is a property of thesurface of the solid or material.

As temperature increases above absolute zero, the electrons become moreenergetic and more easily leave the surface of the solid. When below theenergy required by the work function for the electrons to leave thesurface of the solid, there is a small probability that the electronswill leave the surface. In other words, this is not an on and offfunction. Statistically, a particular electron may have more energy thanthe average energy of the surrounding electrons and may more easilymigrate away from the surface of the solid. So, random electrons maystill leave the surface even when the temperature is below that whichthe work function indicates may allow the electrons to be energizedenough to more freely leave the surface. As a work function of aparticular surface is decreased in a donor (or emitter) surface, as inthe surface conditioning of conductor 110 with a low work function layer120 described above, or according to any one of a number of differentmechanisms (as will be described below), it becomes easier for largernumbers of electrons to leave the donor or emitter surface and migratetoward the receptor surface with the comparatively higher work function.It is more difficult for electrons to freely leave the receptor surfacebased on the higher work function.

A simplified description of the operation of the structural embodimentsaccording to this disclosure may be characterized as follows. The workfunction of the free electrons in the conductor 110 is lowered enough bysurface conditioning or the presence of the low work function layer 120such that the free electrons leak into and through the very thindielectric “layer” 130 in direction A by the mechanism of quantumtunneling at room temperatures. A similar process is occurring in theopposite direction from conductor 140, but at a rate that is orders ofmagnitude lower due to the comparatively high work function of thematerial of the facing surface of conductor 140.

When a particularly low work function (less than 1.0 eV) material, e.g.,silver oxide cesium, is employed as the donor or emitter surface, acomparatively larger number of electrons leave the surface at roomtemperature. When another surface is employed, like copper or gold,which has a comparatively higher work function (5.0 eV) at roomtemperature then, the donor or emitter surface releases comparativelymuch larger numbers of electrons than the receptor surface. Is should benoted that differences in work function in the opposing conductor facesor surfaces of as little as 1.0 eV may produce usable electrical outputfrom the disclosed structures. Quantum tunneling effects are a necessarycomponent of the disclosed schemes and are implemented through theminimal proximities, across the dielectric layer 130, of the facingsurfaces of the conductors 110, 140 and the presence of the low workfunction conditioning, or low work function layer 120, on the surface ofthe conductor 110.

At rest, given the proper combination materials, there is always goingto be energy transfer from the donor or emitter surface to the receptorsurface based on the above-described designed differences in workfunction of the respective surfaces. In this manner, the transfer ofelectrons, in a managed and predictable manner, is directed from aparticular donor or emitter surface to a particular receptor surface. Inembodiments, this is accomplished by conditioning the respectivesurfaces and placing them in properly close proximity to each other. Theunique design placement of the respective layers generally describedabove results in a previously unforeseen, and previously unachievable,measurable electrical power potential or output.

The electron migration process described above continues until theelectric potential is high enough to stop further accumulation ofelectrons in the facing surface of the receptor, conductor 140. Theelectron accumulation on the facing surface of conductor 140 may beconsidered to be substantially equivalent to the electron depletion inthe conditioned facing surface of conductor 110.

When an electrical circuit is completed between the conductors 110, 140(in a manner similar to that shown in FIG. 5) electrons flow via theelectrical circuit pathway from the conductor on which the electrons areaccumulated (the receptor conductor with the comparatively high workfunction facing surface) to the conductor from which the electronsmigrated across the dielectric layer internal to the EH element (thedonor or emitter conductor with the comparatively low (and conditioned)work function surface) to equalize the charges and thus the collectedthermal energy manifested as controlled electron migration betweenrespective conductor surfaces is converted to electrical energy. Withthe static equilibrium state having been disturbed, the migration ofelectrons from the donor or emitter surface to the receptor surfacere-commences.

The donor or emitter surface conductor 110 and the receptor surfaceconductor 140 may be comprised of good conductor materials in order tocomplete the electrical path by conducting electricity well, e.g., withlittle inherent resistance. To drive a lower work function in a surfaceof the conductor 110, a different material can be combined with theconductor 110 by, for example, surface treating the conductor 110 withan oxide and potentially nitrogen to turn the surface of the conductor110 into a form of a semiconductor lowering the work function of thesurface of the conductor 110. As indicated above, it is not a matter ofwhat happens throughout the mass of the conductor 110, but rather thefocus is on what happens at the surface. The material from which theconductor 110 is formed simply needs to provide a good conduction tocomplete the electrical path.

FIG. 2 illustrates a schematic diagram of a second exemplary embodimentof an EH element 200 according to this disclosure. As shown in FIG. 2, aparticular arrangement of the disclosed EH element 200 may again be in aform of a multi-layered component structure including at least a pair ofopposing conductor layers (conductors) 210, 240 set on either face of athin (less than 100 nm, and in embodiments on an order of 20-60angstroms) dielectric layer 230.

Typical conductor materials, by themselves, exhibit comparatively highwork functions without a semiconductor or other surface treatment. As aresult, any opposing conductor 240 may, in an unconditioned state, havea surface that inherently displays a comparatively high (or higher) workfunction. For a dielectric layer, a vacuum or an air gap (in the mannershown in FIG. 1) may present certain challenges in a repeatablemanufacturing process based on the small clearances between the low workfunction layer and the high work function facing surface of the opposingconductor. In this regard, some type of dielectric composition (solid orliquid) may be provided as a formed dielectric layer 230 in order toprovide positive separation between the low work function surface ofconductor 210, or the low work function layer 220, and the facingsurface of the opposing conductor 240.

The presence of the material structure of the dielectric layer 230addresses a difficulty in how to maintain opposing conductive layersnanometers apart over comparatively large areas based on theproportional scales at which the EH elements may be manufactured. Thedielectric (or semiconductor) layer 230 may substantially ensure thatthe electrons transfer from the low work energy surface 220 to thecomparatively higher work energy surface of the conductor 240, whilealso ensuring that the two conductors 210, 240 do not internally shortone another. The presence of the formed dielectric layer 230, or apresence of any dielectric, does not determine a direction of the flowof electrons (see arrow A). That direction of flow is determinedaccording to the differential work functions in the respective donor oremitter, and receptor, surfaces. The dielectric layer 230 does, however,provide the spacer for facilitating the flow of electrons from the lowwork function surface layer 220 to the high work function facing surfaceof the opposing conductor 240. This positive separation ensures that theonly path by which electrons can return to the low work function surfaceis through any attached load. See FIG. 5.

As noted, electrons will randomly leave the surfaces. In the structuresparticularly implemented according to the disclosed schemes,comparatively few electrons will leave the high work function surfacewhile comparatively large numbers of electrons will migrate from the lowwork function surface. Any cloud of electrons accumulating in betweenthe respective surfaces repel each other as the electrons cross thedielectric gap toward the higher work function surface that accepts freeelectrons and holds them because of the high work functioncharacteristic of that surface.

It has been long recognized that a very weak, but manageable, transferof electrons is exhibited, or may be facilitated, between surfaces at aparticular temperature, i.e., with no temperature differential betweenthe surfaces, conceptually in contravention of the Second Law ofThermodynamics. See generally Fu et al., “Realization of Maxwell'sHypothesis—A heat-electric conversion in contradiction to Kelvin'sstatement,” arXiv:physics/0311104 [physics.gen-ph] (Nov. 20, 2003)(describing an electron transfer phenomena in an induced magnetic fieldwhere both parallel surfaces are at a same temperature, theoreticallyviolating the Second Law of Thermodynamics). The disclosed schemes forparticularly presenting structures in which opposing surfaces ofconductor layers are conditioned to have differentiable work functions,and are placed in close enough proximity to substantially ensure aquantum tunneling effect overcome the shortfalls, which those of skillin the art generally accepted, in providing consequential and usableelectrical power out of the disclosed EH elements and EH components.

As mentioned above, quantum tunneling is an essential characteristic ofthe disclosed embodiments. Consider the process of atomic-forcemicroscopy (AFM) which presents a type of scanning probe microscopy(SPM) with demonstrated resolution on the order of fractions of ananometer. In that process, information is gathered by “feeling” or“touching” a surface with a mechanical probe. Piezoelectric elementsthat facilitate tiny, but accurate and precise movements on commandenable very precise scanning. AFM uses the phenomenon of quantumtunneling to increase a current that jumps the gap between the surfaceand the probe tip. This is a phenomenon that was generally accepted notto occur at all at very low voltages. Current varies exponentially as adistance to the surface, a distance between (1) the probe tip and (2)the surface that the probe tip is mapping, is kept between, for example,25 and 100 nm. As the probe tip is scanned across the surface,individual atoms modulate the current significantly. The distance isadjusted and the surface is mapped.

The tunneling effect can be effectively controlled. At about a 200 nmgap, the tunneling effect essentially disappears. At around 20 nm,however, the exponential function of the current increasessignificantly. A wave function begins to overlap the receptor conductoras the gap between the conductors is precisely controlled. Based on thisoverlap, the free electrons can be trapped by the high work functionsurface to become a part of the free electron cloud of the receptorconductor. The high work function surface maintains its high barrieragainst release. As such, residual release of electrons, potentially fortunneling, back in the other direction is significantly limited.

Not only are the compositions of the surfaces important according tomaterials from which they are formed, the internal topography of thedonor (or emitter) and receptor surfaces are also important (the textureis important on a molecular level). In areas in which a surfacetopography comes to a sharp point, clusters of atoms are collectedand/or congregated. At these points, the electric field is particularlyfocused. Any allegedly completely flat surface will include certaintexture in its surface topography that will promote higher tunnelingeffect in the respective raised areas. Embodiments that take additionaladvantage of this phenomenon may be described below with respect to, forexample, FIGS. 3 and 4.

A unique enhancement in the disclosed layered arrangement schemes liesin consistently structurally implementing these quantum tunnelingeffects that are not seen at a macro-level. It is the channeling of thisquantum tunneling effect that causes (or promotes) enough electrontransfer to generate an effective and measurable current through theload, where the conductor layers are separated in the tens of nanometersrange from one another.

The dielectric layer 230 may be formed of candidates including aluminumoxide (AlO3) and Paralyne. Dielectric candidates with large bulk gapsinclude fluorinated Stanene. The dielectric layer 230 may be very thin,in a range of a monolayer of atoms or molecules to layers that are about2000 times that thickness. The dielectric layer 230 may be uniform orvaried in material composition. It also may be fully densified or porouswith gas or vacuum within any voids that may be present. By definition,the dielectric layer 230 should minimize electrical conduction. Inembodiments, the dielectric layer may be 20 to 60 angstroms, to as muchas 100 nm, thick in order to increase the quantum tunneling effect. Athinner dielectric layer 230 may be preferable in its capacity topromote higher electron migration according to the quantum tunnelingaffects, better utilizing a tail of the wave function. The thicker thedielectric layer 230 beyond 100 nm, for example, significantly reducesthe quantum tunneling effect. There may be a lower limit, however, to athickness of the dielectric layer 230 formed of a particular material inthat at very thin layers, dielectric breakdown may occur.

The effects that may be harnessed according to the disclosed schemes arebased on the presence of the low work function surface. The high workfunction surface will generally be at a work function in a range of 2+eVcompared to 1.0 eV or less, for example, 0.8-0.6 eV (and theoreticallyeven as low as 0.1 eV) in the low work function surface. When thesesurfaces are brought into the near contact with one another, separatedby a dielectric layer in the manner described above, electron transferoccurs at a previously unanticipated rate. This electron transfer causesan electrical potential to accumulate in the layered EH elementstructure. As with any other electrical power source, when a load isconnected to the power source, certain depletion of the electricalpotential occurs. Consider that the electrons flow from the high workfunction surface conductor through the load to the low work functionsurface conductor. The equilibrium between the low work function surfaceon the high work function surface is disturbed and electron transferbetween those surfaces re-commences or continues.

In a particular embodiment, the low work function layer may be comprisedof a carbon nitride film deposited by, for example, an RF reactivemagnetron sputtered graphite carbon in an N2 discharge. The effectivework function for the carbon nitride films may be determined using theFowler-Nordheim equation to be in a range of 0.01-0.1 eV. The substratetemperature of 200° C., floating potential at the substrate, andnitrogen partial pressure of 0.3 Pa may be favorable to promote thereaction that lowers the work function. Emitting-current density (J) mayfollow the Fowler-Nordheim (FN) relation:

$J = {\frac{{AE}^{2}}{\phi}{\exp\left( {- \frac{B\;\phi^{3/2}}{\beta\; E}} \right)}}$where A and B are constant, is the dimensionless field enhancementfactor, and E and Φ are the external electric field and the workfunction, respectively. From this relationship, reducing the workfunction is mathematically shown as an effective means to enhanceelectron transfer/migration. Apart from, or in addition to, selectingparticular materials for reducing the work function of, or associatedwith, a first conductor, possible physical mechanisms of reducing thework function may include the charge tunneling, surface roughening, ornano-structuring that enlarge the local curvature of the surface of thedonor or emitter conductor. Chemical adsorption may be employed as well,noting, however, that only the field emission governed by the chemicaladsorption on the surface of the conductor is intrinsic.

A non-limiting list of candidate substrates and/or surface treatments,in addition to those mentioned above, includes the following:

-   -   Single layer graphene    -   Lanthanum hexaboride or LaB6    -   Double-Barrier Quantum Well Structure (AlSb/GaSb/AlSb resonant        tunneling diode structure)    -   Carbon nitride coating    -   Carbon nitride plus boron nitride surface film    -   AgOCe    -   Ga-doped ZnO nanoneedle surface for enhanced electric field        gradient    -   Conductor surface treating with an ionization process    -   RF-reactive sputtered graphite carbon

The differential in work function between the higher work function layerand the low work function layer may be mediated, controlled or otherwiseadjusted (even optimized) based on a composition of the material formingthe intermediate layers at or between the surfaces of the donor andreceptor layers of the conductors, or, for example, based ondifferential surface treatments of the individual donor and receptorsurfaces of the conductors. For the purposes of this disclosure, asurface treatment of the donor or receptor surfaces of the conductorsmay be considered to be, or otherwise to contribute to, the intermediatelayer structure, including the dielectric layer, separating the donorand receptor surfaces.

Exemplary embodiments described and depicted in this disclosure shouldnot be interpreted as being specifically limited to any particularconfiguration of an EH element or EH component structure, except insofaras particular dimensions, as disclosed, are determined to enhance thedescribed electrical power generation capabilities. Additionally,although candidate materials may be specified for each of theconductors, the low work function surface layer or surface layerconditioning, the dielectric layer and the like, the disclosedembodiments should not be interpreted as being limited to any of thespecific examples cited, or to any particular individual materials forforming the particular layers of each EH element. This includes, but isnot limited to, any particular composition of the conductor materials,any particular composition of the low work function layer (or coating ortreatment), or any particular composition of the dielectric layer (toinclude as a vacuum, as an air gap, as a liquid, and/or as a solid (of ahomogeneous or non-homogeneous composition)).

FIG. 3 illustrates a schematic diagram of a third exemplary embodimentof an EH element 300 according to this disclosure. As shown in FIG. 3, aparticular structure of the disclosed EH element 300 may again be in aform of a multi-layered component structure including at least a pair ofopposing conductor layers (conductors) 310, 340 set on either face of athin (typically less than 100 nm, and in embodiments on an order of20-60 angstroms) dielectric layer 330.

FIG. 3 depicts certain variation in a structure of the dielectric layer330. The dielectric layer 330 may, in the same manner as described abovewith regard to the dielectric layer 230 depicted in FIG. 2, be porous ona nanoscale. A particular compound may be placed in the pores. It shouldbe noted that not all materials are, in fact, porous on the nanoscale.There are certain materials that are “densified” enough to be nonporous,even on the nanoscale. In these materials, there is not an opening largeenough for even the smallest atom to fit through. Most materials mayexhibit porosity to some degree, but when certain material formationtechniques are undertaken including, for example, vapor deposition, aparticular material may be rendered non-porous on the atomic ornanoscale. In embodiments, the dielectric layer 330 may be porous inorder that the other material can be inserted in the pores.

In embodiments, the other material may be comprised of metal cations ina water (H₂O) solution, for example, that can enhance thermal energyharvesting. Examples of the metal cations include: Nickel Chloride,Copper Chloride, Ferric Chloride, Potassium Chloride, or most metalSulfates, Iodides, Bromides, and/or Fluorides.

A mechanism for the additional induced voltage is based on theelectro-mechanical interaction (not chemical reaction) between grapheneand a metal cation in solution. For example, using a single Cu2+ withthe same kinetic energy as the {Cu2+} in a water solution at roomtemperature, only the interaction between the single Cu2+ and thegraphene, symmetrically above the carbon ring for simplicity, may beconsidered. The total energy of the graphene-Cu2+ system is calculatedby the Perdew-Bure-Ernzerhof (PBE) method. The first equilibrium stateis located at a separation of dl between the Cu2+ and the center of acarbon ring. When the distance between the Cu2+ and graphene is largerthan dl, the total energy of the system stays constant, which means noenergy conversion occurs between them. Those of skill in the artrecognize that, at room temperature, the Cu2+ cation has a velocity ofapproximately 300 meters per second. When the distance approaches dl(due to ambient thermal atomic motion), the total energy of the systemcan be increased by 4.6 eV. When 4.6 eV energy is transferred tographene from the Cu2+ by inelastic collision, the Fermi level of thegraphene shifts up by 1 eV compared to its Dirac point. This means thatan electron is emitted out of the graphene carbon ring and becomes freeto travel along the graphene.

Further, FIG. 3 is intended to depict a side view of the dielectriclayer 330 formed to have a nonlinear pattern. Such a feature in thephysical construct of the dielectric layer 330 may enhance the activity(motion) of the electrons through the dielectric layer 330 between thelow work function surface 320 of the conductor 310 and the high workfunction surface of the conductor 340. The nonlinear structure, orpatterning, in the dielectric layer 330 enhances the thermal activity ofthe electrons.

A non-linear structure to the dielectric layer 330, as included in thisdisclosure, refers to a locally or overall tapered microstructure whichwill induce significantly enhanced activity (motion) of the electrons atthe “small” ends or locally small end portions in a manner similar tothat described below.

FIG. 4 illustrates a schematic diagram of a fourth exemplary embodimentof an EH element 400 according to this disclosure. As shown in FIG. 4, aparticular arrangement of the disclosed EH element 400 may again be in aform of a multi-layered component structure including at least a pair ofopposing conductor layers (conductors) 410, 440 set on either face of athin (typically less than 100 nm, and in embodiments on an order of20-60 angstroms) dielectric layer 430. A low work function surfacetreatment, or low work function surface layer 420 may be applied to aface of the conductor 410 to promote electron migration from the surfaceof the conductor 410, or from the surface layer 420, in a direction of asurface face of an opposing conductor 440 in direction A as shown.

FIG. 4 depicts another variation in a structure of the dielectric layer430. In this embodiment, the dielectric layer 430 may be particularlyformed, at least in part, as a series of horn structures the small endof the horns terminating at the low work function layer 420. Such astructure may enhance the activity of the electrons at the interface ofthe low work function layer 420 with the small ends of the hornedstructure of the dielectric layer 430 making it easier for the electronsto escape. Ionic liquids (not shown) may be employed to fill the voidsin the dielectric layer 430 created by such a structural arrangement.For embodiments intended to be used in particularly cold environs, theliquid dielectric component may not be included. As depicted, broad endsof the horn structures of the dielectric layer 430 may contact the highwork function surface of the conductor 440.

Regarding these conical shapes, because the energy is equal to one halfthe velocity squared times the mass (E=½ mv²), as a cross-sectiondecreases and the mass therefore decreases, in a resonant structure, thevelocity must increase a square root of the decrease in the mass. Thetaper may be adjusted based on the acoustic impedance and velocity ofthe material so that the energy distribution remains uniform, thustranslation toward the smaller end requires increasing velocity. Thisphenomenon too has been documented on the atomic level. The electronenergy, therefore, is further enhanced simply by a unique configurationof the mechanical structure of the dielectric layer 430.

FIG. 5 illustrates a schematic diagram of an exemplary embodiment of asimple circuit 500 powered by an EH element according to thisdisclosure. The arrangement of the EH element is in a form of themulti-layered component structure including at least a pair of opposingconductors 510, 540 set on either face of a thin (typically less than100 nm, and in embodiments on an order of 20-60 angstroms) dielectriclayer 530. A low work function surface treatment, or low work functionsurface layer 520, may be applied to a face of the conductor 510 topromote electron migration from the surface of the conductor 510, orfrom the surface layer 520 in a direction of a surface face of anopposing conductor 540 in direction A as shown.

In order to obtain power from the EH element, leads 550, 560 may beconnected for routing to and through a load 580. Controlling the currentflow through the load 580 provides a capacity to power the load 580 atdiscrete intervals, or when properly modulated, substantiallycontinuously. Load regulation may not be very good from the EH elementitself. As such, the power source may be conditioned by conditioningcircuitry via, for example a power conditioning circuit 570.Appropriately conditioned, the available energy could provide a constantpower source, or may be cycled. In embodiments, the load 580 may bematched to the power source and a continuous supply of power could beprovided to an appropriately-sized load 580.

If a rate at which the electrons are returned through the externalcircuitry flowing from the conductor 540 of the EH element (the receptorsurface conductor) through the lead 550 in direction B, optionally to apower conditioning circuit 570 and to and through the load 580, and thenvia the lead 560 in direction C to the conductor 510 (the donor surfaceconductor), the load 580 could be powered continuously and forever.Conventional power conditioning or power matching concepts may beapplicable to load match the load to the available power from the EHelement.

FIG. 6 illustrates a schematic diagram of an exemplary embodiment of asimple circuit powered by an EH component 600 including a plurality ofEH elements electrically connected to each other according to thisdisclosure. A structure of an EH component 600 layersappropriately-sized numbers of EH elements 610, configured as describedabove with reference to FIGS. 1-5, as stacks of upward to 100. Each ofthe EH elements 610 may be on the order of tens of nanometers thick, andsandwiched between insulating layers 620, that may be on the order eachof approximately 10 μm thick. The EH elements 610 may be electricallyconnected in order to provide an EH component structure that produces ausable electric power output.

The EH elements 610 are generally thin and fragile. The hosting in theinsulating layers 620 as a form of encasing structural components mayenhance physical strength and usability, and provide a platform forconnection, for example, of electrically interconnecting leads, andexternal wire leads 650, 660. The encasing structure will be generallycomprised of an insulating material. This now-insulated stack of EHelements 610 may then be further housed in, for example, a metallicstructure or structure composed, or formed, of generally any otherstructurally-sound materials. Because the layers are thin themselves,transitional electrically-conducting contacts may be provided in contactwith the layers to provide transition between the layers, andappropriately sized load-bearing wire leads 650, 660 for connecting theEH component structure to a load 680 directly, or through some form ofpower regular to 670, for use.

Voltage stays constant according to a fabrication or formation of the EHcomponent structure. Current scales with surface area of the opposinglow work function and high work function surfaces. As such, power scalesroughly linearly with area (similar to a solar cell). More area causesmigration of more electrons resulting, in turn, when connected to a loadmore current at a same voltage.

As generally indicated above, a series (or stack) of sandwichedstructures may be accumulated to a particular thickness of, for example,50 to 100 (or more) individual EH elements 610 between insulating layers620, according to the dimensions indicated below, to increase the powerout. Each of the individual EH elements 610 may be considered anindividual power source that is connectable in parallel or in series toothers of the EH elements 610, as appropriate.

As an example of a particular conducting layer, graphene has beenexperimentally explored as providing favorable physical and electricalconduction properties. An amount of thermal energy available at roomtemperature yields a theoretical maximum power density available in arange of approximately 1 W per gram. The disclosed schemes are directedto maximizing or optimizing a surface effect. In this regard, thesurface area of the thin film structure that would equate to providingthis 1 Watt would be on an order of 2630 m² of surface area,approximately 51 m×51 m.

For a particular surface area of the disclosed EH component structure, a10 cm² surface area (approximately 1.25×1.25 inches) for EH element 610according to the disclosed schemes may produce approximately 190 nW.Those of skill in the art recognize that this is a small amount of powerand may need to be increased for most applications. Ten squarecentimeters is a relatively large area when compared to microelectronicdevices and products of low power consumption. To scale down thepackaged area, and/or to scale up the power, multiple layers may beemployed in the manner shown in FIG. 6. It should be noted that, becausethermal energy from the environment must flow through the additionalstructural layers to the inner layers, some energy harvesting reductionwill be experienced for each additional internal layer added. Thermalconduction losses through the layers and thermal impedance mismatchesbetween layers may reduce the phonon flow from the environment by afactor of upwards to 5% per EH element 610.

An exemplary experimental EH component structure approximately 10 cm²and 1 mm thick (comprising on the order of 50 internal layers, and anouter encasing layer of 12-15 mils (approximately 350 microns) isanticipated to be able to produce an electric potential of 1.2 V and anoutput power of 5 μW at room temperature. For reference, a typicalelectrically-powered men's wristwatch draws on an order of 1.0-1.2 μW.

Graphene is appropriate as the conductor layer over many other materialsbecause the electrical conductivity in extremely thin layers and theFermi level in the material for graphene is exceptionally good. It ismuch better than, for example, copper, silver or gold in these very thinlayers as are called for in the disclosed embodiments. The physicalcharacteristics are otherwise that graphene is structurally strong anddurable, in order to withstand the manufacturing processes involved inthe disclosed schemes without the layers of the each EH elements failinginternally.

In some “installations” or use cases, it will be appropriate toadditionally encase the insulated EH element layers of the EH componentstructure with an outer shell 630 that provides structural support andmounting for power leads 650, 660 exiting the EH component structure. Atypical outer layer may be on the order of 10 mils thick and may becomprised of, for example, polyether ether ketone (PEEK).

FIG. 7 illustrates a schematic diagram of an exemplary embodiment of anintegrated circuit (IC) component 700 including an integrated circuit720 mounted on an IC substrate 710 and powered by an EH component 730,including a plurality of EH elements electrically connected to eachother according to this disclosure, and to the integrated circuit 720 bypower leads 760, 770. Such an EH component power supply integrated withan IC may find broad application as the EH component 730 may supplypower to the integrated circuit 720 so as to remove a need for a powersupply as a separate component outside the product. In embodiments, apower consumption in a main power supply for a device could be reducedwith the integrated circuit 720 being independently powered by anintegrated EH component 730. The products in which such IC components700 may be mounted may result in the following beneficial outcomes: (1)smaller battery requirements, (2) extended battery life, and (3) a morefocused energy harvesting capability for the main power supply.Implementations of self-powered ICs according to this disclosure couldprovide a full system product scheme for individual component powerthereby modifying power consumption requirements for devices overall.

Incorporation of an EH component 730 in a particular IC structure 700may require proper scaling and process compatibility with the ICmanufacturing processes in order to fully integrate EH components 730 inthe IC structure 700.

For an IC, the structural support may generally be provided by the ICitself in the form of an IC support layer 710. Considering that athickness of a typical IC in a range of approximately 8 mils (200microns), the disclosed schemes may be usable to deposit insulationlayers with a thickness on the order of 1 μm rather than 10 μm inbetween the deposited EH element layers in a structure similar to thatdescribed above with regard to FIG. 6. Because the structural support iscoming from the IC itself, the thickness of the intermediary insulatinglayers can be reduced rendering a 100 layer package on the order of 100μm or 4 mils thick. The packaging for the layered structure will be thesame as the packaging 740 for the IC structure itself. As such, thethickness of the IC will be increased only on the order of 25% or so.And, a one square centimeter package for the EH component 730 at anelectric potential 1.2 V, may achieve an output power of 1.0 μW at roomtemperature.

FIGS. 8A-8I illustrate schematic diagrams of a series of exemplary stepsin a build process of an EH component, including a plurality of EHelements electrically connected to each other according to thisdisclosure.

As shown in FIG. 8A, an insulating layer 810 may be provided.

As shown in FIG. 8B, a conductor layer 820 may be provided on theinsulating layer 810 according to the above-described configurations.

As shown in FIG. 8C, a surface of the conductor layer 820 may beconditioned, or may have adhered, or otherwise placed in close contactto it, a low work function layer 830 rendering the conductor layer 820an electron donor or emitter layer.

As shown in FIG. 8D, a dielectric layer 840 according to any one of theabove-described embodiments may be deposited on the low work functionlayer 830.

As shown in FIG. 8E, another conductor 850 may be brought into contactwith the dielectric layer 840. The conductor 850 may have acomparatively higher work function to its facing surface layer. Thepositioning of the conductor 850 on the dielectric layer 840 completesthe formation of a first EH element.

As shown in FIG. 8F, the build process may continue by providing anotherinsulator layer 811 in contact with the conductor 850 thereby encasingthe first EH element between two insulator layers 810, 811.

As shown in FIG. 8G, the build process depicted in FIGS. 8A-8 F may berepeated in a manner that provides additional EH elements betweeninsulator layers to construct an EH component as, for example, shown inFIG. 6, with the addition of a conductor layer 821, a low work functionlayer 831, a dielectric layer 841, a conductor layer 851, and anotherinsulator layer 812.

As shown in FIG. 8H, the respective EH elements may be connected inseries using an internal conductor 860.

As shown in FIG. 8I, the respective EH elements may be connected inparallel using internal conductors 880 and 890.

It should be noted that the above process may be repeated a number oftimes until an appropriate number of layers constituting an EH conductorcomponent is completed.

The disclosed embodiments may include a method for executing a buildprocess for an EH component including a plurality of EH elementselectrically connected to each other. FIG. 9 illustrates a flowchart ofsuch an exemplary method. As shown in FIG. 9, operation of the methodcommences at Step S9000 and proceeds to Step S9050.

In Step S9050, an insulating layer may be deposited or formed on asurface according to any known material deposition method. Inembodiments, the insulating layer may be presented as a solid structuralcomponent placed on the surface. In embodiments, an insulating layercomponent may be on an order of 10 μm thick for a stand-alone EHcomponent, or if deposited, for example, on a structure, which mayinclude a structure on which an integrated circuit may be formed, may beon an order of 1 μm thick. Operation of the method proceeds to StepS9100.

In Step S9100, an electrode, which may be configured to have acomparatively low work function facing surface, may be deposited on theinsulating layer. In embodiments, an electrode material may be depositedor placed on the insulating layer and additional measures may be takento render the facing surface of an electrode formed of the electrodematerial to have a low work function. In embodiments, the electrodematerial may be graphene and the graphene layer may be only multipleÅngströms in thickness. Operation of the method proceeds to Step S9150.

In Step S9150, the facing surface of the electrode material may besurface conditioned to reduce a work function of the facing surfaceaccording to any of the mechanisms described above. In embodiments, thelow work function surface of the electrode may be integral to theelectrode, or may be an additional layer in intimate contact with thefacing surface of the electrode. Operation of the method proceeds toStep S9200.

In Step S9200, a dielectric layer may be deposited or otherwise formedon the conditioned low work function facing surface of the conductor, oron the low work function layer in intimate contact with the facingsurface of the conductor. The dielectric layer may be less than 100 nmthick. In embodiments, the dielectric layer may be in a range of between20 angstroms and 60 angstroms thick. In embodiments, the dielectriclayer may be formed as a substantially homogeneous single materialstructure. In separate embodiments, the dielectric layer may be formedof multiple materials, including multiple materials in multiple layers.In embodiments, the dielectric layer may be formed in a manner thatproduces a non-linear profile when viewed from at least one edge of thedielectric layer. In embodiments, at least a portion of the dielectriclayer may be formed to have conically or pyramidal shape structures witha thin end being in contact with the low work surface layer and a thickend facing away from the low work surface layer in a directionorthogonal to the low work surface layer. Operation of the methodproceeds to Step S9250.

In Step S9250, another electrode may be deposited, or otherwise formedor positioned, on the dielectric layer to form anelectrode/dielectric/electrode sandwiched structure referred tothroughout this disclosure as an EH element. The another electrode mayhave a facing surface layer that faces the dielectric on which theanother electrode is formed, the facing surface layer of the anotherelectrode having a work function substantially higher than the workfunction of the facing surface of the first-placed electrode, or thework function of the low work function layer placed in intimate contactwith the first-placed electrode. In embodiments, the another electrodemay be formed of a deposited metal composition or material. Operation ofthe method proceeds to Step S9300.

In Step S9300, another insulating layer may be deposited, or otherwiseformed or positioned, on the electrode/dielectric/electrode sandwichedstructure comprising the EH element. The combination of insulatinglayers may provide physical protection for the EH element, electricalisolation from other EH elements in a stacked configuration of an EHcomponent, and a more substantial material structure through whichelectrode connections may be made to the EH element. Operation themethod proceeds to Step S9350.

In Step S9350, the electrodes of the electrode/dielectric/electrode EHelement may be electrically interconnected with electrodes of other EHelements when being formed as a multiple EH element stacked EH componentstructure. Operation of the method proceeds to Step S9400.

Step S9400 is a determination step in which it is determined whether allof the intended electrode/dielectric/electrode sandwiched structurescomprising each of the EH elements are formed in a manner to comprisethe overall intended composition of the EH component structure. Inembodiments, there may be at least 50 separate insulator-separated EHelements electrically interconnected to one another. In embodiments,there may be as many as 100 or more separate insulator-separated EHelements electrically interconnected to one another. At present, apractical upper limit to a number of insulator separated EH elementaccording to the disclosed embodiments has not been established. In thisregard, a number of separate insulator-separated EH elementselectrically interconnected to one another may exceed 100.

If in Step S9400, it is determined that all of the intendedinsulator-separated EH elements have not been formed in a manner thatcompletes the intended stack, operation of the method reverts to StepS9100.

If in Step S9400, it is determined that all of the intendedinsulator-separated EH elements have been formed in a manner thatcompletes the intended stack, operation of the method proceeds to StepS9450.

In Step S9450, electrical leads may be attached to theelectrically-interconnected accumulated electrode/dielectric/electrodesandwich structures as the EH elements comprising the stacked EHcomponent structure. Operation of the method proceeds to Step S9500.

In Step S9500, the electrically-interconnected accumulatedelectrode/dielectric/electrode sandwiched structures each comprising anindividual EH element, which in combination compose an overall stackedEH component structure may be over coated or otherwise externally coatedwith an encasing material or an encasing structure to produce acompleted EH component. Operation of the method proceeds to Step S9550.

In Step S9550, one or more completed EH component structures may beattached to, or embedded in, a device as an autonomous power source, asupplemental power source, or a power source augmenting unit to provideelectrical power to the device. Operation of the method proceeds to StepS9600, where operation of the method ceases.

As is described in some detail above, the systems and methods accordingto this disclosure may be directed at providing autonomous, orsupplemental, power to electronic systems, electronic devices, and/orelectrically-powered system components, including integrated circuits.

FIG. 10 illustrates a schematic diagram of an exemplary device 1000incorporating at least one EH component according to this disclosure asan autonomous power source, or as a supplement to a battery, a photocellor another power source. As shown in FIG. 10, the exemplary device 1000may have a body structure 1010 for housing multiple elements.

One or more photocells 1020 may be provided in a face of the exemplarydevice 1000 to provide power to components within the exemplary device1000. Separately, or additionally, the exemplary device may be poweredby a battery or other external power supply 1060. One or more energyharvester (EH) components or units 1050 may be provided in the exemplarydevice 1000 as an autonomous power source, a power source for individualcomponents within the exemplary device, or as a supplemental powersource to provide bridging or sustaining power when any powerrecoverable from the photocells 1020 or the battery and/or externalpower supply 1060 becomes interrupted, or otherwise unavailable.

The exemplary device 1000 may include a display component 1030 which maybe independently powered by any one of the available power sources,including being autonomously powered by one or more of the EH componentsor units 1050.

The exemplary device 1000 may include a user interface 1040 which may beof any known composition by which a user may interact with the exemplarydevice 1000.

The exemplary device 1000 may include an environmental sensor 1070. Theenvironmental sensor 1070 may be in a form of, for example, atemperature sensor, a CO sensor, a smoke detector, a radon detector, aradiation detector, or other similar detector or detection element forsensing one or more environmental parameters.

The exemplary device 1000 may include an external probe-type sensor 1080by which a user may use the external probe to sense any one of a numberof parameters associated with an environment surrounding the exemplarydevice 1000 and/or a material, structure or body with which the externalprobe sensor may be brought into proximity, near contact, or actualcontact. Such an external probe sensor may, for example, sensemacro-vibrations of the material, structure or body, or of the deviceitself. In this context, the macro vibrations have to do with themovement of a device or body structure, rather than themicro-vibrational energy produced at the electron level on which theenergy harvesting capacity of the disclosed schemes is based.

The exemplary device 1000 may include some manner of biometric sensor1100 by which a particular biometric parameter of a human body, ananimal body, or another living body structure, may be evaluated. Forhuman body parameter detection, the biometric sensor 1100 may providethe exemplary device 1000 with a capacity, for example, to make atherapeutic diagnosis of a condition of the human body, or to monitorparticular parameters by which to aid in medical diagnosis of acondition of the human body.

The exemplary device 1000 may include any other powered device 1090 thatmay be electrically-powered by any one of the available power sourcesincluding particularly by one or more EH components or units.

The above-described exemplary systems and methods reference certainconventional components, sensors, materials, and real-world use cases toprovide a brief, general description of suitable operating, energyharvesting, and power production environments in which the subjectmatter of this disclosure may be implemented for familiarity and ease ofunderstanding.

Those skilled in the art will appreciate that other embodiments of thedisclosed subject matter may be practiced in many disparate electronicsystems, electronic/electrical devices, or electrically-powered systemcomponents of many different configurations.

The exemplary depicted sequence of executable instructions represent oneexample of a corresponding sequence of acts for implementing thefunctions described in the steps of the above-outlined exemplary method.The exemplary depicted steps may be executed in any reasonable order tocarry into effect the objectives of the disclosed embodiments. Noparticular order to the disclosed steps of the methods is necessarilyimplied by the depiction in FIG. 9 except where a particular method stepis a necessary precondition to execution of any other method step.

The disclosed schemes may provide, for example, a coin cell size devicethat produces the same output as a coin cell battery. As such, the yieldis comparable to current small battery technology for driving smallelectronic devices in a package that is comparatively environmentallyfriendly and producible at a same or a less cost than the small battery.

The disclosed schemes may provide an EH component that is capable ofoperating at a temperature above absolute zero and in a completelyambient light devoid environment.

The disclosed schemes may include EH elements and EH componentstructures that may include one or more layers being laminated togetherin a conventional laminating process to produce the stacked layercomponents described above.

The disclosed schemes may provide a unique EH capability that wasunforeseen as it realistically may have been viewed by those of skill inthe art as presenting a concept that, on its face, appears to be incontravention of the Second Law of Thermodynamics, which is an empiricallaw that is not provable. The Second Law of Thermodynamics teaches thatat least two heat sources be provided with one at a lower potential thanthe other. Based on the heat flow of one to the other, the differentialis converted to energy. This is what gives rise to the operation of asteam engine, a thermoelectric generator (TEG), the thermocouple and thelike. More specifically stated, there is an energy release based on aflow of energy from a heat source to a heat sink. So in essence, theSecond Law says that given a temperature differential there is an energygeneration. The difficulty is that when reduced to equations, theequations based on the Second Law of Thermodynamics are reduced to zerofor equal temperature (equal potential) surfaces. In other words, theSecond Law of Thermodynamics would seem to imply that there is no energyrecovery available from two sources at a same temperature in a sealedsystem. One of skill in the art, given the Second Law of Thermodynamics,would likely conclude that no charge difference is possible. It has,however, been mathematically proven that certain electron migration mayoccur given certain constraints (according to standard physicstechniques). As such, it has been proven, that one can get work out of asingle thermal reservoir of uniform temperature simply due to themolecular motion inherent in all formed bodies.

Extensive experimentation resulted in the disclosed schemes that presenta very thin collector layer, and a very thin emitter layer, each ofwhich may be of a thickness on the order of an atomic layer, i.e. 3 Å or0.33 nm, and bring them into very close, non-contact proximity,typically on either side of the intervening layer of a comparablethickness formed of a dielectric material. The disclosed schemesimplement a type of thermal energy harvesting because, at absolute zero,there is no energy harvesting capability. Thermal energy, in the contextof this disclosure, and as is generally understood, is the amount ofenergy in a particular substance due to its molecular vibration ormotion. If a substance is heated, even a little bit above absolute zero,everything in the substance is moving around a little faster and it hasa certain inherent energy.

Although the above description may contain specific details, they shouldnot be construed as limiting the claims in any way. Other configurationsof the described embodiments of the disclosed systems and methods arepart of the scope of this disclosure.

It will be appreciated that various of the above-disclosed and otherfeatures and functions, or alternatives thereof, may be desirablycombined into many other different systems or applications. Also,various alternatives, modifications, variations or improvements thereinmay be subsequently made by those skilled in the art which are alsointended to be encompassed by the following claims.

I claim:
 1. A self-powered integrated circuit component, comprising: anintegrated circuit element provided on a substrate; and an energyharvesting component formed on the substrate, comprising a firstconductor layer formed of a first conductive material on the substrate,a facing surface of the first conductor layer being surface conditionedto have a comparatively low work function value; and a second conductorlayer formed of a second conductive material arranged such that a facingsurface of the second conductor layer faces the facing surface of thefirst conductor layer with a gap formed between respective facingsurfaces of the first conductor layer and the second conductor layer,the gap being in a range of 100 angstroms or less in thickness in adirection orthogonal to the respective facing surfaces, the facingsurface of the second conductor having a work function value at least1.0 eV higher than the comparatively low work function value of thefacing surface of the first conductor layer, the energy harvestingcomponent having a stacked configuration on the substrate totaling lessthan 100 μm thick, the energy harvesting component being electricallyconnected to the integrated circuit element, and the energy harvestingcomponent being configured to generate and electric potential at anytemperature above absolute zero for powering the integrated circuitelement.
 2. The self-powered integrated circuit component of claim 1,the surface conditioning of the facing surface of the first conductorlayer comprising applying a surface treatment to the facing surface ofthe first conductor layer to lower the work function of the facingsurface of the first conductor layer.
 3. The self-powered integratedcircuit component of claim 1, the surface conditioned facing surface ofthe first conductor layer having a work function in a range of 1.0 eV orless and the facing surface of the second conductor layer having a workfunction in a range of 2.0 eV or greater.
 4. The self-powered integratedcircuit component of claim 1, the surface conditioning of the facingsurface of the first conductor layer comprising forming a separatephysical low work function layer on and in intimate contact with thefacing surface of the first conductor layer.
 5. The self-poweredintegrated circuit component of claim 1, further comprising an outerinsulating layer configured to substantially encase the energyharvesting component.
 6. The self-powered integrated circuit componentof claim 1, the stacked configuration of the energy harvesting componentcomprising a plurality of energy harvesting elements and a plurality ofinsulating layers arranged in the stack, the plurality of energyharvesting elements being separated by the plurality of insulatinglayers, and the plurality of energy harvesting elements beingelectrically interconnected with one another.
 7. The self-poweredintegrated circuit component of claim 6, each of the plurality ofinsulating layers having a thickness in a range of 1 μm or less.
 8. Theself-powered integrated circuit component of claim 1, further comprisinga dielectric layer formed in the gap.
 9. The self-powered integratedcircuit component of claim 8, the dielectric layer having a thickness ina range of 20 angstroms to 60 angstroms and being sandwiched between therespective facing surfaces of the first conductor layer and the secondconductor layer.
 10. The self-powered integrated circuit component ofclaim 9, the dielectric layer varying in thickness across a planform ofthe dielectric layer between the respective facing surfaces of the firstconductor layer and the second conductor layer.
 11. The self-poweredintegrated circuit component of claim 9, the dielectric layer beingformed at least in part of a plurality of tapered shapes, each of theplurality of tapered shapes having a tapered structure in which across-sectional area of the each of the plurality of tapered shapes iscomparatively larger at an end facing the facing surface of the secondconductor layer and comparatively smaller at an end facing the facingsurface of the first conductor layer.
 12. The self-powered integratedcircuit component of claim 9, the dielectric layer being formed as aporous layer, at least some of the pores in the porous layer beingfilled at least in part with a metal cation.